System and method for generating extreme ultraviolet light, and laser apparatus

ABSTRACT

An extreme ultraviolet light generation system used with a laser apparatus may be provided, and the extreme ultraviolet light generation system may include: a chamber including at least one window for at least one laser beam and a target supply unit for supplying a target material into the chamber; and at least one polarization control unit, provided on a laser beam path, for controlling a polarization state of the at least one laser beam.

CROSS-REFERENCE TO RELATED APPLICATIONS

The present application is Continuation of application Ser. No.13/126,671 filed on Dec. 14, 2011, which is the U.S. National Phaseunder 35 U.S.C. §371 of International Application No. PCT/JP2011/058468,filed on Mar. 25, 2011, which in turn claims priority from JapanesePatent Application No. 2010-076268 filed on Mar. 29, 2010, and JapanesePatent Application No. 2010-254251 filed on Nov. 12, 2010, thedisclosure of each of which is incorporated herein by reference in itsentirety.

BACKGROUND

1. Technical Field

This disclosure relates to a system and a method for generating extremeultraviolet light and to a laser apparatus.

2. Related Art

With recent increase in integration of semiconductor devices, transferpatterns for use in photolithography of a semiconductor process haverapidly become finer. In the next generation, microfabrication at 70 to45 nm, further, microfabrication at 32 nm or less is to be demanded.Accordingly, for example, to meet the demand for microfabrication at 32nm or less, an exposure apparatus is expected to be developed, where anextreme ultraviolet (EUV) light generation system generating EUV lightof a wavelength of approximately 13 nm is combined with a reductionprojection reflective optical system.

There are mainly three types of EUV light generation systems, namely, alaser produced plasma (LPP) type system using plasma produced byapplying a laser beam onto a target, a discharge produced plasma (DPP)type system using plasma produced by discharge, and a synchrotronradiation type system using orbital radiation.

SUMMARY

An extreme ultraviolet light generation system in accordance with oneaspect of this disclosure may be used with a laser apparatus, and theextreme ultraviolet light generation system may include: a chamberincluding at least one window for at least laser one beam and a targetsupply unit for supplying a target material into the chamber; and atleast one polarization control unit, provided on a laser beam path, forcontrolling a polarization state of the at least one laser beam.

A laser apparatus for outputting a laser beam used to generate extremeultraviolet light in accordance with another aspect of this disclosuremay include a polarization control unit that controls a polarizationstate of the laser beam.

A method for generating extreme ultraviolet light by irradiating atarget material with at least one laser beam in accordance with yetanother aspect of this disclosure may include controlling a polarizationstate of the at least one laser beam.

These and other objects, features, aspects, and advantages of thisdisclosure will become apparent to those skilled in the art from thefollowing detailed description, which, taken in conjunction with theannexed drawings, discloses preferred embodiments of this disclosure.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 schematically illustrates a configuration of an EUV lightgeneration system in accordance with a first embodiment of thisdisclosure.

FIG. 2 shows absorption (percentage of incoming laser beam energy thatis absorbed) of p-polarized and s-polarized components of a laser beamby a metal Sn.

FIG. 3 schematically illustrates a configuration of a polarizationcontrol mechanism in accordance with the first embodiment.

FIG. 4 describes polarization control using the polarization controlmechanism illustrated in FIG. 3.

FIG. 5 schematically illustrates a configuration of a polarizationcontrol mechanism in accordance with a modification of the firstembodiment.

FIG. 6 schematically illustrates a droplet viewed in a directionperpendicular to a beam axis of a pre-pulse laser beam, in plasmageneration process in accordance with the first embodiment.

FIG. 7 schematically illustrates the droplet viewed in a direction ofthe beam axis of the pre-pulse laser beam, in the plasma generationprocess in accordance with the first embodiment.

FIG. 8 schematically illustrates fragments and pre-plasma viewed in thedirection perpendicular to the beam axis of the pre-pulse laser beam, inthe plasma generation process in accordance with the first embodiment.

FIG. 9 schematically illustrates the fragments and the pre-plasma viewedin the direction of the beam axis of the pre-pulse laser beam, in theplasma generation process in accordance with the first embodiment.

FIG. 10 schematically illustrates the fragments, the pre-plasma, andplasma viewed in the direction of the beam axis of the pre-pulse laserbeam, in the plasma generation process in accordance with the firstembodiment.

FIG. 11 schematically illustrates the fragments and the plasma viewed inthe direction of the beam axis of the pre-pulse laser beam, in theplasma generation process in accordance with the first embodiment.

FIG. 12 schematically illustrates an exemplary configuration of apre-pulse laser in accordance with the first embodiment.

FIG. 13 schematically illustrates an exemplary configuration of apre-pulse laser in accordance with a modification of the firstembodiment.

FIG. 14 schematically illustrates a configuration of an EUV lightgeneration system in accordance with a second embodiment of thisdisclosure.

FIG. 15 is a sectional view schematically illustrating the EUV lightgeneration system illustrated in FIG. 14, taken along line XV-XV of FIG.14.

FIG. 16 schematically illustrates an exemplary configuration of apolarization control mechanism in accordance with the second embodiment.

FIG. 17 schematically illustrates a droplet viewed in a directionperpendicular to a beam axis of a pre-pulse beam, in plasma generationprocess in accordance with the second embodiment.

FIG. 18 schematically illustrates the droplet viewed in the direction ofthe beam axis of the pre-pulse laser beam, in the plasma generationprocess in accordance with the second embodiment.

FIG. 19 schematically illustrates fragments and pre-plasma viewed in thedirection perpendicular to the beam axis of the pre-pulse laser beam, inthe plasma generation process in accordance with the second embodiment.

FIG. 20 schematically illustrates the fragments and the pre-plasmaviewed in the direction of the beam axis of the pre-pulse laser beam, inthe plasma generation process in accordance with the second embodiment.

FIG. 21 schematically illustrates the fragments, the pre-plasma, andplasma viewed in the direction perpendicular to the beam axis of thepre-pulse laser beam, in the plasma generation process in accordancewith the second embodiment.

FIG. 22 schematically illustrates the fragments, the pre-plasma, and theplasma viewed in the direction of the beam axis of the pre-pulse laserbeam, in the plasma generation process in accordance with the secondembodiment.

FIG. 23 schematically illustrates a droplet viewed in a directionperpendicular to a beam axis of a pre-pulse laser beam, in plasmageneration process in accordance with a third embodiment of thisdisclosure.

FIG. 24 schematically illustrates the droplet viewed in the direction ofthe beam axis of the pre-pulse laser beam, in the plasma generationprocess in accordance with the third embodiment.

FIG. 25 schematically illustrates pre-plasma viewed in the directionperpendicular to the beam axis of the pre-pulse laser beam, in theplasma generation process in accordance with the third embodiment.

FIG. 26 schematically illustrates the pre-plasma viewed in the directionof the beam axis of the pre-pulse laser beam, in the plasma generationprocess in accordance with the third embodiment.

FIG. 27 schematically illustrates plasma viewed in the directionperpendicular to the beam axis of the pre-pulse laser beam, in theplasma generation process in accordance with the third embodiment.

FIG. 28 schematically illustrates the plasma viewed in the direction ofthe beam axis of the pre-pulse laser beam, in the plasma generationprocess in accordance with the third embodiment.

FIG. 29 schematically illustrates a configuration of an EUV lightgeneration system in accordance with a fourth embodiment of thisdisclosure.

FIG. 30 is a section view schematically illustrating the EUV lightgeneration system illustrated in FIG. 29, taken along line XXX-XXX ofFIG. 29.

FIG. 31 schematically illustrates an exemplary configuration of apre-pulse laser in accordance with a fifth embodiment of thisdisclosure.

FIG. 32 is a perspective view illustrating an example of a polarizationcontrol element used in the pre-pulse laser illustrated in FIG. 31.

FIG. 33 is an exploded, fragmentary longitudinal sectional view of thepolarization control element illustrated in FIG. 32.

FIG. 34 schematically illustrates a configuration of a polarizationcontrol element in accordance with a modification of the fifthembodiment.

FIG. 35 schematically illustrates a configuration of a pre-pulse laserin accordance with the modification of the fifth embodiment.

FIG. 36 schematically illustrates a configuration of an EUV lightgeneration system in accordance with a sixth embodiment of thisdisclosure.

FIG. 37 schematically illustrates an exemplary pulse shape of a laserbeam outputted from a master oscillator in accordance with amodification of the sixth embodiment.

FIG. 38 schematically illustrates a configuration of an EUV lightgeneration system in accordance with a seventh embodiment of thisdisclosure.

FIG. 39 schematically illustrates an exemplary pulse shape of a laserbeam outputted from a master oscillator in accordance with amodification of the seventh embodiment.

FIG. 40 schematically illustrates a configuration of an EUV lightgeneration system in accordance with an eighth embodiment of thisdisclosure.

FIG. 41 schematically illustrates a configuration of an EUV lightgeneration system in accordance with a ninth embodiment of thisdisclosure.

FIG. 42 schematically illustrates an exemplary configuration of afilm-type target supply unit for supplying a film-type target into achamber of the EUV light generation system in accordance with the ninthembodiment.

FIG. 43 schematically illustrates a configuration of an EUV lightgeneration system in accordance with a tenth embodiment of thisdisclosure.

FIG. 44 schematically illustrates relationship between a droplet and atop-hat pre-pulse focused laser beam, which is a focused laser beam of atop-hat pre-pulse laser beam, in accordance with the tenth embodiment.

FIG. 45 illustrates the droplet in FIG. 44 and the vicinity thereof inenlargement.

FIG. 46 schematically illustrates an exemplary configuration of atop-hat transformation mechanism in accordance with the tenthembodiment.

FIG. 47 schematically illustrates a configuration of a top-hattransformation mechanism in accordance with a first modification of thetenth embodiment.

FIG. 48 schematically illustrates a configuration of a top-hattransformation mechanism in accordance with a second modification of thetenth embodiment.

FIG. 49 schematically illustrates a configuration of a top-hattransformation mechanism in accordance with a third modification of thetenth embodiment.

FIG. 50 schematically illustrates a configuration of an EUV lightgeneration system in accordance with an eleventh embodiment of thisdisclosure.

FIG. 51 schematically illustrates an example of a polarization controlmechanism in accordance with a twelfth embodiment of this disclosure.

FIG. 52 schematically illustrates a droplet viewed in a directionperpendicular to a beam axis of a pre-pulse laser beam, in plasmageneration process in accordance with the twelfth embodiment.

FIG. 53 schematically illustrates the droplet viewed in the direction ofthe beam axis of the pre-pulse laser beam, in the plasma generationprocess in accordance with the twelfth embodiment.

FIG. 54 schematically illustrates fragments and plasma viewed in thedirection perpendicular to the beam axis of the pre-pulse laser beam, inthe plasma generation process in accordance with the twelfth embodiment.

FIG. 55 schematically illustrates the fragments and the plasma viewed inthe direction of the beam axis of the pre-pulse laser beam, in theplasma generation process in accordance with the twelfth embodiment.

FIG. 56 schematically illustrates an example of a polarization controlmechanism in accordance with a thirteenth embodiment of this disclosure.

FIG. 57 schematically illustrates an example of a polarization controlelement in accordance with a fourteenth embodiment of this disclosure.

FIG. 58 is an exploded, fragmentary longitudinal sectional view of thepolarization control element illustrated in FIG. 57.

FIG. 59 illustrates an exemplary arrangement of the polarization controlelement illustrated in FIG. 57.

DESCRIPTION OF PREFERRED EMBODIMENTS

Hereinafter, selected embodiments for implementing this disclosure willbe described in detail with reference to the accompanying drawings. Inthe subsequent description, each drawing merely illustrates shape, size,and/or positional relationship of members schematically to the extentthat enables the content of this disclosure to be understood.Accordingly, this disclosure is not limited to the shape, the size,and/or the positional relationship of the members illustrated in eachdrawing. In order to show the configuration clearly in the drawings,part of hatching along a section is omitted. Further, numerical valuesindicated hereafter are merely preferred examples of this disclosure.Accordingly, this disclosure is not limited to the indicated numericalvalues.

First Embodiment

An EUV light generation system in accordance with a first embodiment ofthis disclosure will be described in detail with reference to drawings.In the following description, a case where a target material is turnedinto plasma with two-stage laser irradiation will be shown as anexample. The first embodiment, however, is not limited thereto.

FIG. 1 schematically illustrates a configuration of an EUV lightgeneration system 1 in accordance with the first embodiment. Asillustrated in FIG. 1, the EUV light generation system 1 in accordancewith the first embodiment may comprise: a driver laser for outputtinglaser beams (pre-pulse laser beam L1 and main pulse laser beam L2) tostrike a target material; a chamber 11 in which EUV light is generated;and a focusing optical system for focusing the laser beams (L1 and L2)outputted from the driver laser at a predetermined site inside thechamber 11.

The driver laser may include a pre-pulse laser device and a main pulselaser device. The pre-pulse laser device may include a pre-pulse laserPL, a relay optical system R4, and a polarization control mechanism 10.The main pulse laser device may include a master oscillator MO, apre-amplifier PA, a main amplifier MA, and relay optical systems R1through R3.

The pre-pulse laser PL may output the pre-pulse laser beam L1. Thepre-pulse laser beam L1 may strike the target material supplied into thechamber 11, whereby the target material may be turned into a diffusedtarget. The term “diffused target” is defined herein as a targetincluding at least one of pre-plasma and a fragment. The term“pre-plasma” is defined herein as a plasma state or a state in whichplasma and an atom or a molecule coexist. The term “fragment(s)” isdefined herein as a cluster formed of a target material that has beenirradiated with a laser beam and been fragmented, a cloud ofmicro-droplet(s), or a minute particulate group in which the cluster andthe micro-droplet(s) coexist.

The pre-pulse laser beam L1 outputted from the pre-pulse laser PL mayhave the beam profile thereof expanded by the relay optical system R4.The pre-pulse laser beam L1, then, may have the polarization statethereof controlled by the polarization control mechanism 10. Thepre-pulse laser beam L1, of which the polarization state has beencontrolled, may pass through a laser beam introduction mirror M1 of thefocusing optical system. Thereafter, the pre-pulse laser beam L1 maypass through a window W1 provided to the chamber 11, be reflected by anoff-axis paraboloidal mirror M2 disposed inside the chamber 11, and befocused at a predetermined site (plasma generation region P1) inside thechamber 11. The off-axis paraboloidal mirror M2 may be disposed outsidethe chamber 11. If this is the case, the laser beam reflected by theoff-axis paraboloidal mirror M2 may enter the chamber 11 through thewindow W1 and be focused at the predetermined site (plasma generationregion P1) inside the chamber 11. In a case where a space through whichthe pre-pulse laser beam L1 and/or the main pulse laser beam L2travel(s) is maintained substantially at internal pressure of thechamber 11, the window W1 may be omitted. In such case, an through-holefor the laser beam to pass therethrough may preferably be provided tothe chamber 11.

The master oscillator MO may output the main pulse laser beam L2. Thepre-amplifier PA and the main amplifier MA may each include a gainmedium thereinside, and the gain medium may amplify a laser beam of atleast one predetermined wavelength. The master oscillator MO maypreferably output the main pulse laser beam L2 of a wavelength thatmatches with the above predetermined wavelength. The master oscillatorMO may, without being limited to the following, be a laser oscillatorconfigured to output a single-line laser beam or a multi-line laserbeam, or the master oscillator may MO include a plurality of laseroscillators each configured to output a single-line laser beam or amulti-line laser beam and a combiner for combining the laser beamsoutputted from the plurality of the laser oscillators and outputting thecombined laser beam as the laser beam L2. The laser oscillator may,without being limited to the following, be a semiconductor laseroscillator such as a quantum cascade laser, a gas laser oscillator suchas a CO₂ gas laser, a solid-state laser oscillator such as an opticalparametric oscillator including a nonlinear crystal, or adistributed-feedback laser oscillator. The master oscillator MO mayinclude a wavelength selection unit such as a grating or the likeconfigured to selectively isolate only a laser beam of a desiredwavelength band from the laser beam outputted from the laser oscillator.This configuration makes it possible to match the wavelength of thelaser beam outputted from the master oscillator MO with the gainbandwidth of an amplifier (pre-amplifier PA, main amplifier MA) disposeddownstream of the master oscillator MO in the beam path. The masteroscillator MO may further include a resonator length regulating unit forregulating the resonator length so as to control a wavelength of a laserbeam outputted from the laser oscillator.

The relay optical system R1 may adjust the beam profile of the mainpulse laser beam L2 so that the main pulse laser beam L2 is efficientlyamplified in the pre-amplifier PA. The pre-amplifier PA may be anamplifier including a gain medium containing CO₂ gas, for example. Thepre-amplifier PA may amplify a laser beam outputted from the masteroscillator MO, of which the wavelength matches with the gain bandwidthof the pre-amplifier PA.

The relay optical system R2 may adjust the beam profile of the mainpulse laser beam L2, which has been amplified in the pre-amplifier PA,so that the main pulse laser beam L2 may further be amplified in themain amplifier MA efficiently. The main amplifier MA, as in thepre-amplifier PA, may be an amplifier including a gain medium containingCO₂ gas, for example. The main amplifier MA may amplify, of the mainpulse laser beam L2 which has been amplified in the pre-amplifier PA, alaser beam, of which the wavelength matches with the gain bandwidth ofthe main amplifier MA. In the first embodiment, a gain medium of thesame type may be used in both the pre-amplifier PA and the mainamplifier MA; thus, the wavelengths of the laser beams to be amplifiedtherein are substantially the same.

The main pulse laser beam L2, which has been amplified in the mainamplifier MA, may then passes through the relay optical system R3,whereby the divergence angle thereof is adjusted and the main pulselaser beam L1 is substantially collimated. The main pulse laser beam L2may then be reflected by the laser beam introduction mirror M1 of thefocusing optical system and may thereafter be introduced into thechamber 11, traveling along substantially the same beam path as thepre-pulse laser beam L1. The main pulse laser beam 2 having beenintroduced into the chamber 11 may be reflected by the off-axisparaboloidal mirror M2 to thereby be focused at a predetermined site(plasma generation region P1) inside the chamber 11.

The chamber 11 may be provided with a droplet generator 12. The dropletgenerator 12 may store a target material thereinside and can output thetarget material toward the plasma generation region P1. The targetmaterial may, for example, be Sn. Sn may be stored in the dropletgenerator 12 in a molten state. The droplet generator 12 may comprise anozzle 12 a, through which a droplet D may be outputted. The dropletgenerator 12 may be configured such that pressure is applied to themolten Sn thereinside, for example, which causes the molten Sn to beoutputted as a liquid droplet (droplet D) through the tip of the nozzle12 a. The droplet generator 12, however, is not limited to thisconfiguration. For example, in addition to or in place of thisconfiguration, an electrode may be disposed so as to face the nozzle 12a, and the molten Sn may be pulled out through the nozzle 12 a, in theform of the droplet D, by electrostatic force acting between the tip ofthe nozzle 12 a and the target material. At timing when the droplet Doutputted from the droplet generator 12 arrives in the plasma generationregion P1, the droplet D may be irradiated with the pre-pulse laser beamL1. With this, the droplet D may be transformed into the diffused targetin the plasma generation region P1. Te diffused target is furtherdiffused over time, and a range in which the constituent particlesthereof exist is increased. A range in which the constituent particlesexist at or above predetermined density is defined as the size of thediffused target. At timing when the diffused target reaches apredetermined size (for example, 10 ns to 10 μs after irradiation of thepre-pulse laser beam L1), the diffused target may be irradiated with themain pulse laser beam L2. With this, the diffused target may be heatedand turned into plasma.

Inside the chamber 11, a target collection unit 13 may be provided forcollecting droplets D which have not been irradiated with a laser beamand have passed through the plasma generation region P1, a part of adroplet D which has not been diffused by laser beam irradiation, or thelike.

An EUV collector mirror M3 may further be provided in the chamber 11,the EUV collector mirror M3 selectively reflecting at least EUV light L3among light emitted from the plasma generated in the plasma generationregion. The EUV collector mirror M3 may, for example, be disposedbetween the off-axis paraboloidal mirror M2 and the plasma generationregion P1 with the reflective surface of the EUV collector mirror M3facing the plasma generation region P1. The shape of the reflectivesurface is, for example, spheroidal. The EUV collector mirror M3 maypreferably be positioned such that a first focus of the spheroidalreflective surface coincides with the plasma generation region P1. TheEUV collector mirror M3 may be provided with a through-hole Mia at acenter portion thereof in an axial direction thereof, for example. Thelaser beams (L1 and L2) reflected by the off-axis paraboloidal mirror M2may pass through the through-hole Mia and be focused in the plasmageneration region.

The EUV light L3 may be reflected by the EUV collector mirror M3 andfocused at a second focus of the spheroidal surface. The second focusmay be referred to as an intermediate focus IF. At a connection betweenthe chamber 11 and an exposure device (not shown), an exposure deviceconnection unit 20 is preferably provided, and the exposure deviceconnection unit 20 is preferably provided with a partition wall 21having a pinhole formed therein. The EUV light L3 focused at theintermediate focus IF may pass through the pinhole in the partition wall21 and be introduced into the exposure device via an optical system (notshown).

Absorption of a laser beam by the surface of the droplet D may depend onthe polarization state of the laser beam and the incident angle thereof.This will be described in detail below with reference to the drawing.FIG. 2 shows the absorption of p-polarized and s-polarized components ofa laser beam by a metal Sn. Although the wavelength of the laser beam inthe case illustrated in FIG. 2 is 1.06 μm, the tendency does not changelargely even with a laser beam of other wavelengths. Referring to FIG.2, the absorption of the p-polarized component of the laser beam by themetal Sn may increase as the incident angle increases from 0° until itexceeds approximately 80°, and the absorption may suddenly drop as theincident angle exceeds approximately 85°. On the other hand, theabsorption of the s-polarized component of the laser beam by the metalSn may be substantially at the same level as the absorption of thep-polarized component of the laser beam when the incident angle isaround 0°, but the absorption of the s-polarized component may graduallydecrease as the incident angle comes closer to 90°.

Thus, the metal Sn may tend to absorb the p-polarized component of thelaser beam more at a surface thereof where the incident angle of thelaser beam is larger; whereas, it may tend not to absorb the s-polarizedcomponent of the laser beam at a surface thereof where the incidentangle is larger. This relationship will be considered below, applying toa combination of the spherical droplet D and the focused pre-pulse laserbeam L1 of which the beam profile is substantially circular. Here, theassumption may be the diameter of the beam profile of the focusedpre-pulse laser beam L1 is substantially the same as the diameter of thedroplet D, the irradiation axis passes through the center of the dropletD, and the pre-pulse laser beam L1 is substantially a collimated beam.In such case, the surface region of the droplet D to be irradiated withthe leaser beam is substantially a hemispherical region. At the centerportion of the substantially hemispherical region, the pre-pulse laserbeam L1 may be incident substantially perpendicularly (0°) thereto;thus, both the p-polarized component and the s-polarized of thepre-pulse laser beam L1 may be absorbed at substantially the same level.Meanwhile, the incident angle of the pre-pulse laser beam L1 may comecloser to 90° as the distance from the center portion of thehemispherical region increases. For better understanding, the pre-pulselaser beam L1 being seen as a sun beam, the droplet D can be consideredas the earth at equinox. When the pre-pulse laser beam L1 is polarizedsuch that it is incident on the droplet D as mostly the s-polarizedcomponent, the laser beam is incident at a large angle with respect tothe earth's surface near the polar region; thus, the absorption of thepre-pulse laser beam L1 around the polar region is extremely low. On theother hand, in a region near the equator which is under the morning orevening sunlight, an apparently p-polarized component of the laser beamis incident at a large angle with respect to the earth's surface; thus,the laser beam is absorbed with relatively high absorption. As a result,the laser beam is absorbed with differing absorption around the polarregion and around the equator at dawn or dusk. Here, the case where aradially polarized pre-pulse laser beam L1 is incident on a surface of asphere will be discussed. In this case, using the analogy of the earth,the p-polarized component of the laser beam can be incident at a largeangle both around the polar region and the equator at dawn or dusk. Onthe contrary, when an azimuthally polarized pre-pulse laser beam L1 isincident on the droplet D, the s-polarized component of the laser beamcan be incident at a large angle both around the polar region and theequator at dawn or dusk. As a result, the energy of the pre-pulse laserbeam L1 may be absorbed around the center of the droplet D but reflectedas the distance from the center increases. As described above,controlling the polarization state of the pre-pulse laser beam L1 allowsmakes it possible ti control the absorption of the pre-pulse laser beamL1 by the surface of the droplet D. This means that it is possible tocontrol the distribution of heat input of the pre-pulse laser beam L1 onthe surface of the droplet D. As the heat input state changes, the stateof the diffused target may change in accordance therewith. That is,controlling the polarization state of the pre-pulse laser beam L1 makesit possible to control the state of the diffused target.

In the first embodiment, the pre-pulse laser beam L1 with which thedroplet D is irradiated is radially polarized. With this, the pre-pulselaser beam L1 may be incident on substantially the entire surface of thehemispheric droplet D as the p-polarized component. Accordingly,compared to a case where the droplet D is irradiated with a randomlypolarized pre-pulse laser beam L1 or a linearly polarized pre-pulselaser beam L1, the absorption of laser energy at the surface of thedroplet D increases, whereby the droplet D can absorb relatively highenergy. In other words, when the pre-pulse laser beam L1 is radiallypolarized, compared to a case where it is in another polarization state,a desired effect can be achieved with lower laser energy.

Next, an example of a polarization control mechanism in accordance withthe first embodiment will be described with reference to the drawings.FIG. 3 schematically illustrates the configuration of the polarizationcontrol mechanism in accordance with the first embodiment. FIG. 4 is adrawing for describing the principle of the polarization control by thepolarization control mechanism illustrated in FIG. 3. Note that a casewhere the pre-pulse laser PL outputs a linearly polarized pre-pulselaser beam L1 a will be described as an example in the first embodiment.

Polarization Control Mechanism

As illustrated in FIG. 3, a polarization control mechanism 10 may be ann-divided wave plate 101 having an n-gonal principal surface (octagonalin this example). The n-divided wave plate 101 may be configured of aplurality of plate-shaped twisted nematic (TN) cells 111 through 11 n,each cell being an isosceles triangle. The n-divided wave plate 101 maybe formed in a plate-shape by arranging the TN cells 111 through 11 nsuch that vertices of the isosceles triangles are gathered. Thus, aninterior angle of a vertex of each of the TN cells 111 through 11 n isan angle (45° in this example) equal to 360° divided by the number ofthe TN cells 111 through 11 n (eight in this example). The orientationof optical axis of each of the TN cells 111 through 11 n, each servingas a wave plate, differs by a predetermined angle from an adjacent TNcell 111 through 11 n. The predetermined angle may be given as an angle(22.5° in this example) equal to 180° divided by the number of TN cells111 through 11 n. The polarization direction of a laser beam havingpassed through each TN cell 111 through 11 n may be converted inaccordance with an angle between the optical axis of each TN cell 111through 11 n and the direction of linear polarization. With this, thepolarization direction of the laser beam having passed through each TNcell 111 through 11 n may be converted into a predetermined polarizationdirection at each portion of the cross section. Accordingly, using suchn-divided wave plate 101 as the polarization control mechanism 10 makesit possible to convert the linearly polarized pre-pulse laser beam L1 ainto a radially polarized pre-pulse laser beam L1 b. In this example, acase where a linearly polarized laser beam is converted into a radiallypolarized laser beam has been shown; however, by appropriately arrangingTN cells each having an optical axis in a predetermined orientation, alaser beam passing therethrough may be converted into an azimuthallypolarized laser beam.

Modification of Polarization Control Mechanism

The polarization control mechanism 10 in accordance with the firstembodiment may be replaced by a polarization control mechanism 210illustrated in FIG. 5. FIG. 5 schematically illustrates theconfiguration of the polarization control mechanism in accordance with amodification of the first embodiment. As illustrated in FIG. 5, thepolarization control mechanism 210 in accordance with the modificationmay include a phase compensation plate 211, a polarization rotationplate 212, and a theta cell 213. The phase compensation plate 211 may,for example, shift the phase of the pre-pulse laser beam L1 a passingthrough the upper half of the transmissive optical surface thereof by90°. The bottom half of the phase compensation plate 211 may transmitthe pre-pulse laser beam L1 a without causing the phase thereof to beshifted. The polarization rotation plate 212 may shift the phase of thepre-pulse laser beam L1 a incident thereon by 90°. The theta cell 213may be configured to rotate molecular orientation of a liquid crystalinside a cell along a traveling direction of the incident beam, and isan element configured to rotate a polarization axis of the incidentbeam, as in the molecular orientation. Accordingly, the linearlypolarized pre-pulse laser beam L1 a having passed through the phasecompensation plate 211 and the polarization rotation plate 212 may besubjected to optical rotation effect when passing through the theta cell213, thereby being converted into the radially polarized pre-pulse laserbeam L1 b. Note that the order of the phase compensation plate 211 andthe polarization rotation plate 212 may be interchangeable. Further,with the polarization control mechanism 210 in accordance with themodification, the linearly polarized pre-pulse laser beam L1 a can beconverted into an azimuthally polarized pre-pulse laser beam.

Next, plasma generation process in accordance with the first embodimentwill be described in detail with reference to the drawings. FIGS. 6through 11 illustrate the plasma generation process in accordance withthe first embodiment. FIGS. 6, 8, and 10 schematically illustrate adroplet D, pre-plasma PP1, fragments DD1, and/or plasma PR1 viewed in adirection perpendicular to the beam axis of the pre-pulse laser beam L1respectively at each stage. FIGS. 7, 9, and 11 schematically illustratethe droplet D, the pre-plasma PP1, the fragments DD1, and/or the plasmaPR1 viewed in the direction of the beam axis of the pre-pulse laser beamL1 respectively at each stage of the plasma generation process.

As shown FIG. 6, the droplet D is irradiated with a focused beam inwhich the pre-pulse laser beam L1 is focused (hereinafter referred to aspre-pulse focused laser beam LF1). Here, the pre-pulse focused laserbeam LF1 is the pre-pulse laser beam L1 that has been reflected by theoff-axis paraboloidal mirror M2. A polarization state of a laser beamreflected by the off-axis paraboloidal mirror M2 does not change.Accordingly, the polarization state of the pre-pulse focused laser beamLF1 in the first embodiment is radial as in the case of the pre-pulselaser beam L1 b. The spot diameter of the pre-pulse focused laser beamLF1 at the irradiation point (plasma generation region P1) is preferablysubstantially the same as or larger than the diameter of the droplet D.

When the droplet D is irradiated with the radially polarized pre-pulsefocused laser beam LF1, in substantially an entire region on the surfaceof the droplet D which is irradiated with the laser beam, the laser beammay be incident thereon as the p-polarized component, as illustrated inFIG. 7. As illustrated in FIG. 8, the pre-plasma PP1 may spread to aside of the droplet D which is irradiated with the pre-pulse focusedlaser beam LF1. At this time, as illustrated in FIG. 9, compared to thecase where the droplet D is irradiated with a linearly polarized laserbeam or a randomly polarized laser beam, the droplet D can be convertedinto the pre-plasma PP1 that is a more isotropically diffused sphere asviewed in the direction of the beam axis of the pre-pulse focused laserbeam LF1. Note that the rate at which the diameter of the pre-plasma PP1spreads can be controlled by controlling the energy of the pre-pulsefocused laser beam LF1. The energy of the pre-pulse focused laser beamLF1 may be controlled such that the diameter of the pre-plasma PP1 isapproximately the same size as the spot diameter of the main pulsefocused laser beam LF2 (See FIG. 10) at the irradiation point thereof atpredetermined timing (See FIG. 8 or 9). Further, as illustrated in FIG.8, granular target material scatters (hereinafter referred to asfragment(s) DD1) to a side opposite of the side of the droplet D whichis irradiated with the pre-pulse focused laser beam LF1.

Subsequently, at least one of the pre-plasma PP1 and the fragments DD1into which the droplet D has been transformed by being irradiated withthe pre-pulse focused laser beam LF1 may be irradiated with the mainpulse focused laser beam LF2. Here, the main pulse focused laser beamLF2 is the main pulse laser beam L2 that has been reflected by theoff-axis paraboloidal mirror M2. Further, the main pulse focused laserbeam LF2 generally has a circular cross-section. The beam diameter ofthe main pulse focused laser beam LF2 at the focus position thereof(plasma generation region P1) may be controlled so as to beapproximately the same, at predetermined timing, as the diameter of thediffused target or larger than the diameter of the diffused target. Inthe present embodiment, the main pulse focused laser beam LF2 has acircular cross-section. In addition, the pre-plasma PP1 is anisotropically diffused sphere. Accordingly, the pre-plasma PP1 can beirradiated with the main pulse focused laser beam LF2 with the beamdiameter of the main pulse focused laser beam LF2 at the focus positionthereof being matched with the diameter of the pre-plasma PP1.

In this way, the droplet D is irradiated with the radially polarizedpre-pulse laser beam, whereby the absorption of the pre-pulse laser beamcan be increased. Accordingly, the energy required to transform thedroplet D into the diffused target can be reduced. The diffused targetis irradiated with the main pulse focused laser beam LF2 havingsubstantially the same diameter as the diffused target, whereby laserenergy that does not contribute to plasma generation can largely bereduced. As a result, the EUV light can be generated with smallerenergy. In other words, energy conversion efficiency (CE) can beimproved. Here, the CE can be defined as the ratio of the energy of theemitted EUV light to the energy of the laser beam with which the targetmaterial is irradiated.

In the present embodiment, the pre-plasma PP1 is irradiated with themain pulse focused laser beam LF2 at timing when the diameter of thepre-plasma PP1 is at substantially the same as the beam diameter of themain pulse focused laser beam LF2, but without being limited thereto,the fragments DD1 may be irradiated with the main pulse focused laserbeam LF2 at timing when the diameter of the range of the distributedfragments DD1 is at substantially the same as the beam diameter of themain pulse focused laser beam LF2.

Pre-Pulse Laser

Next, a pre-pulse laser PL in accordance with the first embodiment willbe described in detail with reference to the drawing. In the firstembodiment, exemplified as the pre-pulse laser PL is a self-mode-lockedTi:sapphire laser which outputs a pulsed laser beam having a pico-secondorder pulse width, but the pre-pulse laser PL is not limited thereto.FIG. 12 schematically illustrates the configuration of the pre-pulselaser in accordance with the first embodiment. As illustrated in FIG.12, the pre-pulse laser PL may comprise a resonator configured of asemiconductor saturable absorber mirror M12 and an output coupler M17.Within this resonator, disposed in order from the semiconductorsaturable absorber mirror M12 may be a concave high reflective mirrorM13 that converges a laser beam incident on the semiconductor saturableabsorber mirror M12, a high reflective mirror M11 that transmits apumping beam LE outputted from, for example, an external pumping sourceand reflects the laser beam inside the resonator, a Ti:sapphire crystalTS1 that is excited by the pumping beam LE from the external source andoscillates a laser beam, a high reflective mirror M14 that reflects thelaser beam inside the resonator, and two prisms M15 and M16 thatseparate a laser beam of a desired wavelength out of the laser beamoutputted from the Ti:sapphire crystal TS1. Note that beam input/outputend surfaces of the Ti:sapphire crystal TS1 may be Brewster-cut tosuppress reflection of the incident beam. In this configuration, asecond-harmonic beam of a laser beam outputted from an external Nd:YVO4laser, for example, may be introduced as the pumping beam LE via thehigh reflective mirror M11. Then, the laser beam may be oscillated,having the recovery time of the semiconductor saturable absorber mirrorM12 synchronized with the longitudinal mode determined by the distancein which the beam makes a round-trip in the resonator. With this, apulsed laser beam having a pico-second order pulse width may beoutputted from the pre-pulse laser PL. Using such pulsed laser beamhaving a pico-second order pulse width as the pre-pulse laser beam L1enables to increase irradiation energy density per unit time, wherebythe droplet can be transformed into the diffused target efficiently.

Further, when such pulsed laser beam having a pico-second order pulsewidth is used as the pre-pulse laser beam L1 a and a solid target of Sn,for example, is used as a target, only a surface thereof can beinstantaneously heated without destroying the interior of the solidtarget. In other words, of the entire volume of the target, only a verysmall surface volume thereof can be turned into pre-plasma. As thepre-plasma is irradiated with the main pulse focused laser beam,generation of debris can be prevented. Note that, depending on the sizeof the target, pulse energy of the pre-pulse laser beam L1 may beinsufficient. If this is the case, the pre-pulse laser beam L1 may beamplified by a regenerative amplifier and then the target may beirradiated therewith.

Modification of Pre-Pulse Laser

Further, the pre-pulse laser PL in accordance with the first embodimentcan be replaced by a pre-pulse laser PL210 illustrated in FIG. 13. Inthe modification, a mode-locked Yb-doped fiber laser that outputs apulsed laser beam having a pico-second order pulse width is exemplifiedas the pre-pulse laser PL210, but the pre-pulse laser PL210 is notlimited thereto. FIG. 13 schematically illustrates the configuration ofthe pre-pulse laser in accordance with the modification of the firstembodiment. As illustrated in FIG. 13, the pre-pulse laser PL210 inaccordance with the modification may comprise: a plurality of opticalfibers 130 constituting a laser beam path; a combining unit 134 wherethe plurality of the optical fibers 130 are connected; a semiconductorsaturable absorber mirror (SESAM) 131 and an output coupler 138 that arerespectively provided at each end of the connected optical fiber andthat cooperatively form a resonator; a plurality of lenses M31 and M32that regulate the beam profile of the laser beam reflected by thesemiconductor saturable absorber mirror 131 and input the beam to oneend of a branch of the optical fiber 130; a polarization control unit132 configured to control the polarization state of the laser beaminside the resonator; a beam pump 133 configured to introduce a pumpingbeam into the resonator at one end of a branch of the optical fiber 130;a Yb-doped fiber 135 provided at a portion of the optical fiber 130 andconfigured to amplify the pumping laser beam; a collimator lens M33configured to collimate the laser beam outputted radially from one endof the Yb-doped fiber 135; a grating pair 136 configured to output acollimated laser beam of a selected wavelength; a high reflective mirrorM34 marking a turning point of this branch; and an isolator 137configured to output a laser beam of a target wavelength from the outputcoupler 138. Using such fiber laser having a pico-order pulse width asthe pre-pulse laser PL210 makes it possible to increase irradiationenergy density per unit time, whereby the droplet can be transformedinto the diffused target efficiently.

When Sn is used as the target material, the shorter the wavelength ofthe irradiating laser beam, the higher the absorption of the laser beamby the droplet D. For example, when an Nd:YAG laser is used as thepre-pulse laser PL, a second-harmonic (λ2ω=532 nm) beam or athird-harmonic (λ3ω=266 nm) beam, when used as the pre-pulse laser beamL1, may yield higher absorption by the droplet D than a first-harmonic(λω=1064 nm) beam does.

As described so far, according to the first embodiment, it is possibleto control the polarization state of the pre-pulse laser beam L1 fortransforming the target material into the diffused target, the CE can beimproved.

Second Embodiment

According to a second embodiment of this disclosure, debris generatedwhen plasma is generated can be collected efficiently by controlling apolarization state of a laser beam. Hereinafter, an EUV light generationsystem in accordance with the second embodiment of this disclosure willbe described in detail with reference to the drawings. In the secondembodiment, an adverse effect of debris containing a charged particlethat contains an ion generated when plasma is generated will be reducedusing a magnetic field. FIG. 14 schematically illustrates theconfiguration of the EUV light generation system in accordance with thesecond embodiment. FIG. 15 is a sectional view schematicallyillustrating the EUV light generation system illustrated in FIG. 14,taken along line XV-XV.

As illustrated in FIG. 14, an EUV light generation system 2 inaccordance with the second embodiment may be similar in configurationwith the EUV light generation system 1 illustrated in FIG. 1. However,in the second embodiment, the polarization control mechanism 10 isreplaced by a polarization control mechanism 310. The polarizationcontrol mechanism 310 will be described later in detail.

As illustrated in FIG. 15, the EUV light generation system 2 maycomprise coils 14A and 14B and debris collection units 15A and 15B. Thecoils 14A and 14B may be a pair of coils constituting an electromagnet,and may be disposed outside the chamber 11 such that the center of themagnetic flux of the magnetic field generated by the coils passesthrough the plasma generation region P1. The debris collection units 15Aand 15B may be disposed in the chamber 11, and are preferably disposedon the central axis of the magnetic flux of the magnetic field generatedby the coils 14A and 14B. Each of the debris collection units 15A and15B may be cylindrical with one end thereof opening toward the plasmageneration region P1. The debris trapped in the magnetic field generatedby the coils 14A and 14B travels along the magnetic flux of the magneticfield, and thereafter may enter the debris collection unit 15A or 15B.This makes it possible to collect the debris containing a chargedparticle that contains an ion generated at the plasma generation regionP1.

When debris generated as plasma is generated is collected, the debriscan be collected more efficiently by controlling the state of theplasma. The state of the plasma can be controlled by controlling thestate of the diffused target at a preceding stage thereof. Further, thestate of the diffused target can be controlled by controlling thepolarization state of the pre-pulse laser beam with which the droplet Dis irradiated. Hereinafter, a mechanism of controlling the polarizationstate of the pre-pulse laser beam in accordance with the secondembodiment will be described in detail with reference to the drawing.

FIG. 16 schematically illustrates the configuration of a polarizationcontrol mechanism in accordance with the second embodiment. Asillustrated in FIG. 16, the polarization control mechanism 310 mayinclude a half wave plate 311 which causes the polarization direction ofthe linearly polarized pre-pulse laser beam L1 a incident thereon to berotated by a predetermined degree. The half wave plate 311 may be acrystal such as a cadmium sulfide single crystal or the like, forexample. The half wave plate 311 is preferably disposed so that thepolarization direction of a rotated pre-pulse laser beam L1 c coincideswith the direction of the magnetic field (MD) generated by the coils 14Aand 14B. Here, when θ is defined as an angle between the direction ofthe optic axis of the crystal and the polarization direction of thelinearly polarized pre-pulse laser beam, the pre-pulse laser beam L1 a,having passed through the half wave plate 311, may be converted into alinearly polarized laser beam with the polarization direction thereofbeing rotated by 2θ. Accordingly, rotating the half wave plate 311 makesit possible to regulate the polarization direction of the pre-pulselaser beam L1 c so that it coincides with the direction of the magneticfield.

Here, plasma generation process in accordance with the second embodimentwill be described in detail with reference to the drawings. FIGS. 17through 22 schematically illustrate the plasma generation process inaccordance with the second embodiment. FIGS. 17, 19, and 21schematically illustrate the droplet D, pre-plasma PP2, and plasma PR2viewed in a direction perpendicular to the beam axis of the pre-pulselaser beam L11 respectively at each stage. FIGS. 18, 20, and 22schematically illustrate the droplet D, the pre-plasma PP2, and theplasma PR2 viewed in the direction of the beam axis of the pre-pulselaser beam L11 respectively at each stage.

First, as illustrated in FIG. 17, the droplet D is irradiated with apre-pulse focused laser beam LF11 in which the pre-pulse laser beam L11is focused. The pre-pulse focused laser beam LF11 is linear polarized.The case where the droplet D is irradiated with the linearly polarizedpre-pulse focused laser beam LF11 will be described. As illustrated inFIG. 18, a large portion of the pre-pulse focused laser beam LF11 isincident on end surfaces in the direction MD of the magnetic field asthe p-polarized component thereof, of the region of the droplet D whichhas been irradiated with the pre-pulse focused laser beam LF11;therefore, the absorption of the laser beam is relatively high. On theother hand, a large portion of the pre-pulse focused laser beam LF11 isincident on end surfaces in the direction perpendicular to the directionMD of the magnetic field as the s-polarized component, of the irradiatedregion; therefore, the absorption of the laser beam is relatively low.At a region where the absorption of the laser beam is high, heat inputto the target material is relatively large; thus, plasma with relativelyhigh temperature may be generated. Meanwhile, at a region where theabsorption of the laser beam is low, heat input to the target materialis relatively small; thus, plasma with relatively low temperature may begenerated. The plasma with high temperature has higher diffusion ratethan the plasma with low temperature. As a result, the pre-plasma PP2generated from the droplet D may be formed into a shape elongated in thedirection MD of the magnetic field, as illustrated in FIGS. 19 and 20.When the elongated pre-plasma PP2 is irradiated with the main pulsefocused laser beam LF2 in which the main pulse laser beam L2 is focused,as illustrated in FIGS. 21 and 22, the plasma PR2 elongated in thedirection MD of the magnetic field may be generated. Debris emitted whensuch elongated plasma PR2 is generated has a velocity vector in thedirection MD of the magnetic field. The debris having the velocityvector in the direction MD of the magnetic field is trapped in themagnetic field more reliably. As a result, the collection rate of thedebris is expected to rise. Note that the fragments DD1 are not affectedby the magnetic field at this point since they are electrically neutral.Further, when the fragments DD1 are irradiated with the main pulse laserbeam, plasma is generated and is formed into a shape elongated in thedirection MD of the magnetic field by the magnetic field.

The above-described configuration may make it possible to efficientlycollect the debris generated when plasma is generated.

Third Embodiment

Next, an EUV light generation system in accordance with a thirdembodiment of this disclosure will be described in detail. The EUV lightgeneration system in accordance with the third embodiment may be similarin configuration to the EUV light generation system of the firstembodiment, and a mass-limited droplet is used as the droplet D. Themass-limited droplet is constituted by the smallest required number ofatoms for yielding desired EUV light output when almost all of the atomsconstituting the droplet are excited to generate the EUV light. When thetarget is excited by a laser having an output of 10 kW and a repetitionrate of 100 kHz and when the desired EUV light output is 100 W, thediameter of the mass-limited droplet can be estimated at approximately10 μm.

The plasma generation process in accordance with the third embodimentwill be described in detail with reference to the drawings. FIGS. 23through 28 shows the plasma generation process in accordance with thethird embodiment. FIGS. 23, 25, and 27 schematically illustrate thedroplet D, a diffused target PP3, and plasma PR3 viewed in a directionperpendicular to the beam axis of the pre-pulse laser beam L1respectively at each stage. FIGS. 24, 26, and 28 schematicallyillustrate the droplet D, the diffused target PP3, and the plasma PR3viewed in the direction of the beam axis of the pre-pulse laser beam L1respectively at each stage.

As illustrated in FIG. 23, first, the droplet D is irradiated with thepre-pulse focused laser beam LF1 in which the pre-pulse laser beam L1 isfocused. The pre-pulse focused laser beam LF1 may be radially polarized.When the droplet D is irradiated with the radially polarized pre-pulsefocused laser beam LF1, as illustrated in FIG. 24, the pre-pulse focusedlaser beam LF1 may be incident on the irradiation surface of thespherical droplet D mainly as the p-polarized component. Accordingly,the droplet D may diffuse isotropically and transformed into a diffusedtarget PP3 having isotropic distribution. When such diffused target PP3is irradiated with a main pulse focused laser beam LF2 having a circularbeam profile, as illustrated in FIGS. 25 through 28, the entirety of thediffused target PP3 can be heated, whereby plasma PR3 having hightemperature can be generated. As a result, almost all the atoms of thedroplet D can be excited to generate the EUV light L3.

The above-described configuration makes it possible to excite thedroplet D efficiently and to prevent the debris from being generated.

Fourth Embodiment

Next, an EUV light generation system in accordance with a fourthembodiment of this disclosure will be described in detail with referenceto the drawings. In the fourth embodiment, the pre-pulse laser beam L1may be focused on the droplet D in a direction different from thedirection the main pulse laser beam L2 is focused thereon. FIG. 29schematically illustrates the configuration of an EUV light generationsystem 4 in accordance with the fourth embodiment. FIG. 30 is asectional view schematically illustrating the EUV light generation 4illustrated in FIG. 9, taken along line XXX-XXX.

As illustrated in FIG. 29, the EUV light generation system 4 inaccordance with the fourth embodiment may be similar in configuration tothe EUV light generation system 1 illustrated in FIG. 1. In the fourthembodiment, however, only the main pulse laser beam L2 is introducedinto the chamber 11 via the window W1. Therefore, the laser beamintroduction mirror M1 can be replaced by a high reflective mirror.

As illustrated in FIG. 30, in the EUV light generation system 4, thepre-pulse laser beam L1 may be reflected by an off-axis paraboloidalmirror M4 that is different from the off-axis paraboloidal mirror forthe main pulse laser beam L2, and focused in the plasma generationregion P1 inside the chamber 11 via a separate window W3.

In this way, even when the pre-pulse laser beam L1 and the main pulselaser beam L2 are focused on the droplet D respectively in differentdirections, by controlling the polarization state of the pre-pulse laserbeam L1 using the above-described polarization control mechanism 10 or210, or the like, similar effect as in the above-described first orthird embodiment can be obtained.

Fifth Embodiment

Next, an EUV light generation system in accordance with a fifthembodiment of this disclosure will be described in detail with referenceto the drawings. In the above-described embodiments, the polarizationcontrol mechanism 10, 210, or 310 for controlling the polarization stateof the pre-pulse laser beam L1 has been disposed on a beam path betweenthe pre-pulse laser PL or PL210 and the plasma generation region P1. Inthe fifth embodiment, however, a polarization control mechanism may beintegrally provided to a pre-pulse laser.

FIG. 31 schematically illustrates the configuration of a pre-pulse laserin accordance with the fifth embodiment. As illustrated in FIG. 31, fora pre-pulse laser PL510 in accordance with the fifth embodiment, of twomirrors constituting a resonator, a reflective-type polarization controlelement 51 may be used for a rear mirror (See (a) in FIG. 31). Byappropriately selecting the polarization control element 51, thepre-pulse laser PL510 may be configured to output a radially polarizedpre-pulse laser beam L1 b (See (b) in FIG. 31) or to output anazimuthally polarized pre-pulse laser beam Lid (See (c) in FIG. 31). Fora front mirror, a front mirror M51, which is an output coupler, forexample, may be used. Between the polarization control element 51 andthe front mirror M51, a chamber containing a laser medium 52 may bedisposed.

Polarization Control Element

One example of the polarization control element 51 will be described indetail with reference to the drawing. In this description, thepolarization control element 51 used to generate the radially polarizedpre-pulse laser beam L1 b will be shown as an example. FIG. 32 is aperspective view illustrating one example of the polarization controlelement illustrated in FIG. 31. FIG. 33 is an enlarged fragmentarylongitudinal section of the polarization control element illustrated inFIG. 32. As illustrated in FIG. 32, for the polarization control element51 in accordance with the fifth embodiment, a so-called circular gratingmirror 510 in which a grating 511 is formed on a reflective surface of ahigh-reflective mirror 501 concentrically may be used. Further, asillustrated in FIG. 33, in the high-reflective mirror 501, a multilayerfilm 512 may be formed on a reflective surface of a glass substrate 513.On the top-most layer of the multilayer film 512, the grating 511 may beformed concentrically. Such circular grating mirror 510 having theconcentric grating 511 being formed therein may transmit an azimuthallypolarized laser beam and reflect a radially polarized laser beam of thelaser beam oscillated by the laser medium 52. Accordingly, when thecircular grating mirror 510 is used as the rear mirror of the laserresonator, only the radially polarized laser beam may be amplifiedinside the resonator. That is, the pre-pulse laser beam L1 outputtedfrom the pre-pulse laser PL510 will be the radially polarized pre-pulselaser beam L1 b.

Modification of Polarization Control Element

In addition, for the polarization control element 51 illustrated in FIG.31, a rear mirror unit 520 illustrated in FIG. 34 may also be used. FIG.34 schematically illustrates the configuration of a polarization controlelement in accordance with a modification of the fifth embodiment. Asillustrated in FIG. 34, the rear mirror unit 520 may be configured bycoaxially combining an axicon mirror 522 and a w-axicon mirror 523,which cooperatively may function as a retroreflector. That is, the rearmirror unit 520 may comprise a configuration of a so-called tripleaxicon unit. Each reflective surface of the axicon mirror 522 and of thew-axicon mirror 523 is preferably inclined 45° with respect to a beamaxis of a laser beam which is amplified by the laser medium 52. Further,each reflective surface is preferably coated with a dielectricmultilayer film. Controlling reflectivity of a laser beam incident asthe p-polarized component on the dielectric multilayer film and as thes-polarized component thereon enables a laser beam either with radialpolarization or azimuthal polarization to be outputted. For example,making the reflectivity of the p-polarized component of a laser beamincident on the dielectric multilayer film higher than the reflectivityof the s-polarized component of the laser beam incident on thedielectric multilayer film enables the radially polarized pre-pulselaser beam L1 b to be generated. On the other hand, making thereflectivity of the p-polarized component of a laser beam incident onthe dielectric multilayer film higher than the reflectivity of thes-polarized component of the laser beam incident on the dielectricmultilayer film enables the azimuthally polarized pre-pulse laser beamLid to be generated.

Modification of Pre-Pulse Laser

FIG. 35 schematically illustrates the configuration of a pre-pulse laserin accordance with a modification of the fifth embodiment. Asillustrated in FIG. 35, a transmissive-type polarization control element53 may be used as a polarization control element for controlling thepolarization state of the pre-pulse laser beam L1. Even with thisconfiguration, the radially polarized or azimuthally polarized pre-pulselaser beam L1 can be generated.

As has been described above, according to the fifth embodiment, as inthe above-described embodiments, it is possible to control thepolarization state of at least the pre-pulse laser beam L1 that turnsthe target material (Sn) into the diffused target, of laser beams thatturn the target material supplied as the droplet D into plasma. Withthis, the CE can be improved.

Sixth Embodiment

Next, an EUV light generation system in accordance with a sixthembodiment will be described in detail with reference to the drawing. Inthe sixth embodiment, a case where a droplet is turned into plasma withsingle irradiation will be described as an example. FIG. 36schematically illustrates the configuration of the EUV light generationsystem in accordance with the sixth embodiment.

As illustrated in FIG. 36, an EUV light generation system 6 inaccordance with the sixth embodiment may be similar in configuration tothe EUV light generation system 1 illustrated in FIG. 1. However, in thesixth embodiment, only the main pulse laser beam L2 is introduced intothe chamber 11 through the window W1. Further, in a modification of thesixth embodiment, a pre-pulse laser beam L21 and a main pulse laser beamL22 may be introduced into the chamber 11 via the window W1.Accordingly, the laser beam introduction mirror M1 may simply be ahigh-reflective mirror.

Further, as illustrated in FIG. 36, provided on a beam path of a mainpulse laser beam L2 a outputted from a master oscillator MO is apolarization control mechanism 610 for controlling a polarization stateof the main pulse laser beam L2 a. The polarization control mechanism610 is preferably disposed at a position where the polarization controlmechanism 610 can control the polarization state of the main pulse laserbeam L2 a before the main pulse laser beam L2 a enters an amplifier. Inparticular, when the polarization control mechanism 610 is configured ofa transmissive-type optical element, for example, disposing thepolarization control mechanism 610 on the beam path between the masteroscillator MO and the amplifier makes it possible to prevent thepolarization control mechanism 610 from being deteriorated due tovariation in temperature of the polarization control mechanism 610. Notethat, in FIG. 36, a case where the polarization control mechanism 610converts the linearly polarized main pulse laser beam L2 a into aradially polarized main pulse laser beam L2 b is shown as an example.

In this way, even when the droplet D is irradiated with only the mainpulse laser beam L2 and is turned into plasma, the absorption of thelaser energy on the surface of the droplet D can be improved bycontrolling the polarization state of the main pulse laser beam L2 to beeither radial or azimuthal. In other words, it is possible to improvethe CE.

Modification

FIG. 37 is a time waveform showing temporal change in intensity of alaser beam outputted from the master oscillator in accordance with amodification of the sixth embodiment. In the modification of the sixthembodiment, as illustrated in FIG. 37, the master oscillator MO may beconfigured to output both the pre-pulse laser beam L21 and the mainpulse laser beam L22 with a time difference t. With this, as in any oneof the above-described first through fifth embodiments, the droplet D isirradiated with the pre-pulse laser beam L21 and turned into thediffused target, and thereafter the diffused target is irradiated withthe main pulse laser beam L22 and turned into plasma. Note that otherconfigurations and effects are similar to those of the above-describedsixth embodiment; thus, the duplicate description thereof is omittedhere.

Seventh Embodiment

Next, an EUV light generation system in accordance with a seventhembodiment of this disclosure will be described in detail with referenceto the drawing. In the seventh embodiment, a case where a droplet isturned into plasma with single irradiation and the master oscillatoroutputs a main pulse laser beam of which the polarization state iscontrolled is shown as an example. FIG. 38 schematically illustrates theconfiguration of the EUV light generation system in accordance with theseventh embodiment.

As illustrated in FIG. 38, an EUV light generation system 7 inaccordance with the seventh embodiment may be similar in configurationto the EUV light generation system 6 illustrated in FIG. 36. In theseventh embodiment, however, the polarization control mechanism 610 isomitted and the master oscillator MO is replaced by a master oscillatorMO710 including a polarization control element 710. In the seventhembodiment as well, only a main pulse laser beam L32 may be introducedinto the chamber 11 via the window W1. In a modification of the seventhembodiment, a pre-pulse laser beam L41 and a main pulse laser beam L42may be introduced into the chamber 11 via the window W1. Accordingly,the laser beam introduction mirror M1 may simply be a high-reflectivemirror.

In this configuration, for the polarization control element 710 providedto the master oscillator MO710, either of the polarization controlelement 51 or 53 shown in any one of FIGS. 31 through 35 may be used.Other configurations and effects are similar to those of theabove-described first through sixth embodiments; thus, the duplicatedescription thereof is omitted here.

Modification

FIG. 39 is a time waveform showing temporal change in intensity of alaser beam outputted from the master oscillator in accordance with amodification of the seventh embodiment. In the modification of theseventh embodiment, as in the above-described modification of the sixthembodiment, as illustrated in FIG. 39, the master oscillator MO710 maybe configured to output both the pre-pulse laser beam L41 and the mainpulse laser beam L42 with a time difference t. With this, as in any oneof the above-described first through sixth embodiments, the droplet D isirradiated with the pre-pulse laser beam L41 and at least part of thedroplet D is turned into the diffused target, and thereafter thediffused target is irradiated with the main pulse laser beam L42 andturned into plasma. Note that other configurations and effects aresimilar to those of the above-described seventh embodiment; thus, theduplicate description thereof is omitted here.

Eighth Embodiment

Next, an EUV light generation system in accordance with an eighthembodiment of this disclosure will be described with reference to thedrawing. In the eighth embodiment, the pre-pulse laser beam is radiallypolarized and the main pulse laser beam is azimuthally polarized. Notethat, in the eighth embodiment, only configurations different from thoseof the above-described first embodiment will be described, but thisdisclosure is not limited thereto.

FIG. 40 schematically illustrates the configuration of an EUV lightgeneration system in accordance with the eighth embodiment. Asillustrated in FIG. 40, an EUV light generation system 8 in accordancewith the eighth embodiment may be similar in configuration to the EUVlight generation system 1 illustrated in FIG. 1, but the masteroscillator MO is replaced by a master oscillator MO810 including apolarization control element 810 which converts a laser beam into anazimuthally polarized laser beam. Accordingly, a main pulse laser beamL52 outputted from the master oscillator MO810 is an azimuthallypolarized laser beam.

In this way, the pre-pulse laser beam L1 is radially polarized and themain pulse laser beam L52 is azimuthally polarized, whereby theabsorption of the pre-pulse laser beam L1 can be increased and thegeneration efficiency of the diffused target can be improved. As aresult, the emission efficiency of the EUV light L3 can be improved.Other configurations and effects are similar to those of theabove-described first through seventh embodiments; thus, the duplicatedescription thereof is omitted here.

Ninth Embodiment

Next, an EUV light generation system in accordance with a ninthembodiment of this disclosure will be described in detail with referenceto the drawings. In the ninth embodiment, a solid target will be used asa target in place of the droplet D. Note that the ninth embodiment willbe described while citing the above-described first embodiment, but thisdisclosure is not limited thereto.

FIG. 41 schematically illustrates the configuration of an EUV lightgeneration system in accordance with the ninth embodiment. FIG. 42 is asectional view schematically illustrating the EUV light generationsystem illustrated in FIG. 41, taken along line XLII-XLII, whichschematically illustrates a configuration of film-type target supplyunit that supplies a film-type target in the chamber of the EUV lightgeneration system in accordance with the ninth embodiment.

As illustrated in FIG. 41, an EUV light generation system 9 inaccordance with the ninth embodiment may be similar in configuration tothe EUV light generation system 4 illustrated in FIGS. 29 and 30. Asillustrated in FIGS. 41 and 42, however, in the EUV light generationsystem 9, the droplet generator 12 is replaced by a film-type targetsupply unit 910.

As illustrated in FIG. 42, the film-type target supply unit 910 maycomprise a film-type target DF that is rotated with being supported by aplurality of rollers 921, at least one of the rollers 921 beingdriven-type. The film-type target DF may be ribbon composed of Sn, whichis the target material, or a ribbon-like member with Sn coated thereon.The film-type target DF is disposed such that the film-type target DFpasses through the plasma generation region P1 from the exterior of thechamber 11, for example. In the film-type target supply unit 910,rotation driven-type roller 921 is driven at least at the time ofgenerating plasma. With this, an unused region of the film-type targetDF is supplied to the plasma generation region P1 at the time ofgenerating plasma. When the film-type target DF is irradiated with thepre-pulse laser beam of which the polarization state is controlled, thelaser energy is absorbed efficiently, whereby the diffused target isgenerated. Thereafter, the diffused target is irradiated with the mainpulse laser beam, whereby plasma is generated and the EUV light isemitted. In this way, regardless of the form of the target, when thetarget is irradiated with a laser beam of which the polarization stateis controlled, the EUV light can be generated efficiently.

Other configurations and effects are similar to those of theabove-described first through eighth embodiments; thus, the duplicatedescription thereof is omitted here.

Tenth Embodiment

Next, an EUV light generation system in accordance with a tenthembodiment of this disclosure will be described in detail with referenceto the drawing. In the tenth embodiment, beam profile in a planeperpendicular to the beam axis of the laser beam may be controlled. Thebeam profile may be controlled such that the beam profile at a positionwhere a droplet is irradiated therewith has desired uniformity in aregion larger than a predetermined region. The predetermined region, forexample, means a circular region having a diameter larger than thediameter of the droplet, when the droplet is spherical. The desireduniformity of the beam profile of the laser beam means such profile thatdifference between the maximum value and the minimum value of beamintensity fall within a predetermined range. In the tenth embodiment,only configurations that differ from those of the above-described firstembodiment will be described, but this disclosure is not limitedthereto.

FIG. 43 schematically illustrates the configuration of the EUV lightgeneration system in accordance with the tenth embodiment. Asillustrated in FIG. 43, an EUV light generation system 1010 inaccordance with the tenth embodiment may be similar in configuration tothe EUV light generation system 1 illustrated in FIG. 1, and may furthercomprise a top-hat transformation mechanism 1000 that controls the beamprofile in a plane perpendicular to the beam axis of the pre-pulse laserbeam that is focused on the droplet. The top-hat transformationmechanism 1000 may be disposed between the pre-pulse laser PL and thepolarization control mechanism 10, for example. Alternatively, thetop-hat transformation mechanism 1000 may be disposed downstream in thebeam path from the polarization control mechanism 10. Hereinafter, thepre-pulse laser beam L1 of which the beam profile has been controlled bythe top-hat transformation mechanism 1000 is referred to as a top-hatpre-pulse laser beam L1001. Other configurations are similar to those ofthe EUV light generation system 1 illustrated in FIG. 1.

Here, relationship between the top-hat pre-pulse laser beam L1001 andthe droplet D will be described in detail with reference to thedrawings. In the subsequent description, a case where the droplet D is amass-limited droplet will be shown as an example. FIG. 44 schematicallyillustrates relationship between the droplet and the top-hat pre-pulsefocused laser beam in which the top-hat pre-pulse laser beam is focusedin accordance with the tenth embodiment. FIG. 45 illustrates the dropletillustrated in FIG. 44 and the vicinity thereof in enlargement.

As illustrated in FIG. 44, a beam profile S of the top-hat pre-pulsefocused laser beam LF1001 in which the top-hat pre-pulse laser beamL1001 is focused is flat in a range Dt within a circle having a diameterat least equal to or larger than a diameter Dd of the droplet D. Notethat the beam intensity within the range Dt does not necessarily have tobe uniform. Here, the beam profile S indicates the beam profile along across-section.

Here, the uniformity in the beam profile S within the range Dt will bedescribed. In FIGS. 44 and 45, the required range Dt may be expressed inthe following formula (1) and uniformity C of the beam profile S withinthe range Dt may be expressed in the following formula (2), where Dd isthe diameter of the droplet D, ΔX is a half-width of a range ofvariation in a center position of the droplet D when the droplet D isirradiated with a laser beam at the plasma generation region P1 with apredetermined number of irradiation as a modulus, Dt is a range of aflat area in the beam profile S, Imax is the maximum value of theintensity within the range Dt, and Imin is the minimum value of theintensity within the range Dt.Dt≧Dd+2ΔX  (1)C=(Imax−Imin)/(Imax+Imin)×100(%)  (2)

In this way, the beam profile S may have a plurality of peaks and aplurality of bottoms within the range Dt. In this case, however, a gapbetween adjacent peak and bottom is, preferably, sufficiently small withrespect to the diameter Dd of the droplet D. The uniformity C ispreferably at or below 20%, and is more preferably at or below 10%.

When the droplet is irradiated with a pre-pulse focused laser beamhaving such flat beam profile, a position where the diffused target isgenerated will be stabilized even when the variation ΔX in the positionof the droplet at the time of irradiation exists. As a result, stabilityin the EUV energy when the EUV light is emitted by irradiating thediffused target with the main pulse laser beam to generate plasma mustbe improved.

Top-Hat Transformation Mechanism

Next, a top-hat transformation mechanism in accordance with the tenthembodiment will be described in detail with reference to the drawing.FIG. 46 schematically illustrates the configuration of the top-hattransformation mechanism in accordance with the tenth embodiment. Asillustrated in FIG. 46, a top-hat transformation mechanism 1000 may beconfigured of a high precision diffractive optical element (DOE) 1001.The DOE 1001 may comprise a high precision grating on a surface on whichthe pre-pulse laser beam L1 is incident or on a surface from which thepre-pulse laser beam L1 exits. The pre-pulse laser beam L1 having exitedfrom the DOE 1001 is three-dimensionally diffracted. As a result, thebeam profile of the pre-pulse laser beam L1 is adjusted, and thepre-pulse laser beam L1 is turned into a top-hat pre-pulse laser beamL1001. The outputted top-hat pre-pulse laser beam L1001 passes through afocusing optical system M, is turned into the top-hat pre-pulse focusedlaser beam LF1001, and is focused in the plasma generation region P1inside the chamber 11 so that the beam profile thereof is substantiallyflat in the predetermined region at a position where the droplet D isirradiated therewith. Note that the focusing optical system M mayinclude the polarization control mechanism 10, the laser beamintroduction mirror M1, the off-axis paraboloidal mirror M2, and soforth. Further, a transmissive-type DOE is illustrated as an example inFIG. 46, but without being limited thereto, a reflective-type DOE mayalso be used.

First Modification of Top-Hat Transformation Mechanism

FIG. 47 schematically illustrates the configuration of a top-hattransformation mechanism in accordance with a first modification of thetenth embodiment. As illustrated in FIG. 47, the top-hat transformationmechanism 1000 in accordance with the tenth embodiment may also beconfigured of a phase optical element 1002. The phase optical element1002 has a wave-like shaped surface on which the pre-pulse laser beam L1is incident or from which the pre-pulse laser beam L1 exits. Thus, thepre-pulse laser beam L1 passing through the phase optical element 1002is subjected to a phase shift in accordance with the position throughwhich the pre-pulse laser beam L1 passes. As a result, the beam profileof the pre-pulse laser beam L1 is adjusted, and the pre-pulse laser beamL1 is turned into the top-hat pre-pulse laser beam L1001. Then, thetop-hat pre-pulse laser beam L1001 is turned into the top-hat pre-pulsefocused laser beam LF1001 through the focusing optical system M, and isfocused in the plasma generation region P1 inside the chamber 11 so thatthe beam profile thereof is substantially flat in the predeterminedregion at a position where the droplet D is irradiated therewith. Notethat a transmissive-type phase optical element is illustrated as anexample in FIG. 47, but without being limited thereto, a reflective-typephase optical element may also be used.

Second Modification of Top-Hat Transformation Mechanism

FIG. 48 schematically illustrates the configuration of a top-hattransformation mechanism in accordance with a second modification of thetenth embodiment. As illustrated in FIG. 48, the top-hat transformationmechanism 1000 in accordance with the tenth embodiment may be configuredof a mask 1003 that transmits only a portion of the pre-pulse laser beamL1 where the beam profile is flat and a collimator lens 1004 that turnsthe pre-pulse laser beam L1 of which the divergence angle has spreadafter passing through the mask 1003 into a collimated beam. In thiscase, the image at the mask 1003 may be imaged at the position where thedroplet is irradiated through the collimator lens 1004 and the focusingoptical system M.

Third Modification of Top-Hat Transformation Mechanism

FIG. 49 schematically illustrates the configuration of a top-hattransformation mechanism in accordance with a third modification of thetenth embodiment. As illustrated in FIG. 49, the top-hat transformationmechanism 1000 in accordance with the third modification of the tenthembodiment may be configured of a micro fly-eye optical element 1005 inwhich a plurality of tiny concave lenses is two-dimensionally arrangedon a surface on which the pre-pulse laser beam L1 is incident or fromwhich the pre-pulse laser beam L1 exits. A beam incident on the microfly-eye optical element 1005 has the divergence angle thereof increased,and each beam of which the divergence angle is increased is made to besuperimposed on each other at a focal plane of the focusing opticalsystem by the focusing optical system M. As a result, the beam profileat the focal place of the focusing optical system M can be made flat byso-called Koehler illumination. Further, the micro fly-eye opticalelement 1005 may be a micro fly-eye lens configured of tiny convexlenses.

Further, in the examples of the top-hat transformation mechanismsillustrated in FIGS. 46 through 49, a case where the top-hattransformation mechanism is configured of the focusing element and thetop-hat transformation mechanism has been illustrated, but theconfiguration may be such that the focusing optical system and thetop-hat transformation mechanism are integrally formed into one element.For example, the top-hat transformation mechanism may be an element onwhich concavities and convexities serving as a diffractive opticalelement are formed on a focusing lens, or may be an optical element inwhich a phase shifting function is provided to a focusing mirror. Notethat other configurations and effects are similar to those of theabove-described first through ninth embodiments; thus, the duplicatedescription thereof is omitted here.

Eleventh Embodiment

Next, an EUV light generation system in accordance with an eleventhembodiment of this disclosure will be described in detail with referenceto the drawing. The top-hat transformation mechanism in accordance withthe above-described tenth embodiment may, for example, be applied to acase where the pre-pulse laser beam L1 and the main pulse laser beam L2strike the target material in differing directions.

FIG. 50 schematically illustrates the configuration of the EUV lightgeneration system in accordance of the eleventh embodiment. Asillustrated in FIG. 50, an EUV light generation system 1011 inaccordance with the eleventh embodiment may be similar in configurationto the EUV light generation system 4 illustrated in FIGS. 29 and 30, andthe top-hat transformation mechanism 1000 is provided downstream in thebeam path from the polarization control mechanism 10. Alternatively, thetop-hat transformation mechanism 1000 may be disposed upstream in thebeam path from the polarization control mechanism 10. Otherconfigurations are similar to those of the EUV light generation system 4illustrated in FIGS. 29 and 30. However, the off-axis paraboloidalmirror M4 for focusing the pre-pulse laser beam L1 in the plasmageneration region P1 as illustrated in FIG. 30 is replaced by ahigh-reflective mirror M5 having a flat reflective surface and anoff-axis paraboloidal mirror M6 disposed inside the chamber 11 in anexample illustrated in FIG. 50. Other configurations and effects aresimilar to those of the above-described first through tenth embodiments;thus, the duplicate description thereof is omitted here.

Such configuration makes it possible to optimize the absorption of thepre-pulse focused laser beam by the droplet D, and the droplet D can beirradiated with the pre-pulse focused laser beam with flat beam profile.Thus, energy required to generate the diffused target can be reduced andthe state of the generated diffused target can be stabilized. As aresult, the energy of the EUV light can further be stabilized whilemaintaining high conversion efficiency.

Twelfth Embodiment

The pre-pulse laser beam and/or the main pulse laser beam with which thetarget is irradiated are not limited to a radially polarized laser beam,an azimuthally polarized laser beam or a linearly polarized laser beam.For example, it may be a circularly polarized laser beam or a laser beamin which direction of linear polarization is randomly oriented. Thus, inthe twelfth embodiment, a case where the pre-pulse laser beam and/or themain pulse laser beam are controlled to be a circularly polarized laserbeam will be illustrated as an example.

FIG. 51 schematically illustrates the configuration of a polarizationcontrol mechanism in accordance with the twelfth embodiment. Asillustrated in FIG. 51, a transmissive-type quarter wave plate 120 maybe used as the polarization control mechanism in the twelfth embodiment.The quarter wave plate 120 may be disposed such that the incidentsurface thereof is perpendicular to the beam axis of the incident beamL120. At this time, as illustrated in FIG. 51, when a polarizationdirection 5120 of the linearly polarized incident beam L120 is inclined45° with respect to an optic axis D120 of a crystal constituting thequarter wave plate 120, an output beam L121 having passed through thequarter wave plate 120 may be turned into a circularly polarized laserbeam. Alternatively, when the polarization direction 5120 of thelinearly polarized incident beam L120 is inclined −45° with respect tothe optic axis D120, a rotational direction of the circularly polarizedoutput beam L121 may be reversed. In this way, a linearly polarizedlaser beam may be converted into a circularly polarized laser beam byusing the quarter wave plate 120.

As illustrated in FIGS. 52 and 53, for example, when the pre-pulsefocused laser beam LF1 with which the droplet D serving as the target isirradiated is a circularly polarized laser beam, absorption indexprofile of the pre-pulse focused laser beam LF1 at the surface of thedroplet D may be symmetrical with respect to the beam axis AF of thepre-pulse focused laser beam LF1. In this case, the beam axis AFpreferably substantially coincides with the center of the droplet D. Asa result, as illustrated in FIGS. 54 and 55, the pre-plasma PP1 and/orthe fragments DD1 are diffused symmetrically with respect to the beamaxis AF. The pre-plasma PP1 and/or the fragments DD1 which have beendiffused symmetrically may be irradiated with the main pulse focusedlaser beam LF2.

In this way, when the pre-pulse laser beam L1 is circularly polarized,the absorption index profile of the pre-pulse focused laser beam LF1 bythe droplet D may be symmetrical with respect to the beam axis AF. Withthis, the pre-plasma PP1 and/or the fragments DD1 derived from thedroplet D may also be diffused symmetrically with respect to the beamaxis AF. When the target material is diffused symmetrically as describedabove, the pre-plasma PP1 and/or the fragments DD1 which are irradiatedwith the main pulse focused laser beam LF2 will have a circularcross-section. When the main pulse focused laser beam LF2 has a circularcross-section and the cross-section is substantially the same shape asthe cross-section of the target material, the CE may be improved in somecases.

Further, the polarization control mechanism in accordance with thetwelfth embodiment and one of the above-described top-hat transformationmechanisms can be provided together on a beam path along which only thepre-pulse laser beam L1 passes. With this, even when the position of thedroplet D in the plasma generation region P1 varies, the entireirradiation surface of the droplet D is irradiated with the circularlypolarized top-hat pre-pulse focused laser beam LF1001 with flat beamprofile, and the absorption index profile of the top-hat pre-pulsefocused laser beam LF1001 by the droplet D can be made symmetrical withrespect to the beam axis AF. As a result, the state of the generateddiffused target can be prevented from being fluctuated, and the targetcan be diffused symmetrically with respect to the beam axis AF, wherebythe EUV light L3 can be generated more stably.

The transmissive-type quarter wave plate 120 has been used as thepolarization control mechanism above, but without being limited thereto,a reflective-type quarter wave plate may be used as well. In addition,in the twelfth embodiment, a case where a linearly polarized laser beamis converted into a circularly polarized laser beam using a quarter waveplate has been shown as an example. Other configurations and effects aresimilar to those of the above-described first through eleventhembodiments; thus, the duplicate description thereof is omitted here.

Thirteenth Embodiment

Further, the pre-pulse laser beam and/or the main pulse laser beam withwhich the target is irradiated may be elliptically polarized. Anelliptically polarized laser beam may be obtained by a polarizationcontrol mechanism using a Babinet-Soleil compensator 121, for example,as illustrated in FIG. 56. However, the configuration is not limitedthereto.

As illustrated in FIG. 56, the Babinet-Soleil compensator 121 mayinclude a first crystal 122 and a second crystal 123. The first crystal122 and the second crystal 123 may each have a shape of a wedgesubstrate. Here, thickness of the entire Babinet-Soleil compensator 121may be modified by moving either one of the first crystal 122 and thesecond crystal 123 in the direction of the optic axis thereof. Usingthis principle, a phase difference between the incident beam and theoutput beam may be modified relatively freely within a range from 0 toλ/2.

The Babinet-Soleil compensator 121 is preferably disposed such that theincident surface thereof is perpendicular to the beam axis of theincident beam L120. At this point, as illustrated in FIG. 56, thepolarization direction D122 of the linearly polarized incident beam L120is inclined 45° with respect to the optic axis D121 of theBabinet-Soleil compensator 121, and the second crystal 123 is displacedin the direction of D121 to regulate the phase difference, whereby thepolarization state of the output beam L121 that has passed through theBabinet-Soleil compensator 121 can be controlled. For example, theoutput beam 121 may be made to be an elliptically polarized beam. Bymaking the pre-pulse laser beam L1 an elliptically polarized laser beam,the pre-plasma PP1 and/or the fragments DD1 generated from the droplet Dcan be controlled to be diffused in desired profile. Otherconfigurations and effects are similar to those of the above-describedfirst through twelfth embodiments; thus, the duplicate descriptionthereof is omitted here.

Fourteenth Embodiment

The pre-pulse laser beam and/or the main pulse laser beam with which thetarget is irradiated may be a laser beam having linear polarizationcomponents which are randomly oriented. Such laser beam can be obtained,as illustrated in FIG. 57, with a polarization control mechanism using arandom phase plate 140, for example. However, the configuration is notlimited thereto.

As illustrated in FIGS. 57 and 58, the random phase plate 140 may beconfigured such that tiny concavities and convexities having a pixelsize d are randomly arranged two-dimensionally on an incident surface,an output surface, or a reflective surface of a disc having a diameterD, for example. The random phase plate 140 may divide an incident beamhaving a diameter DM into tiny beams having the pixel size d. The phasedifference between a tiny beam passing through a convex portion 141 anda tiny beam passing through a concave portion 142 can be made to be π,for example. This, for example, as illustrated in FIG. 58, is madepossible by satisfying the condition Δt=λ/2(n1−1), in which Δt is thedifference in height between the convex portion 141 and the concaveportion 142 (or thickness of the convex portion 141), λ is thewavelength of an incident beam, and n1 is a refractive index. Althoughthe transmissive-type random phase plate 140 has been shown as anexample above, it is possible to yield the phase difference of π, forexample, with a reflective-type random phase plate as well. Asillustrated in FIG. 59, the random phase plate 140 may be disposedimmediately before a focusing lens 143 (or focusing mirror).

In this way, by making the pre-pulse laser beam L1 a laser beam havinglinear polarization components which are randomly oriented, theabsorption of the laser beam on the surface of the droplet can be madeuniform. With this, the pre-plasma PP1 and/or the fragments DD1generated from the droplet D can be made to be diffused symmetricallywith respect to the axis of the laser beam. As a result, the CE can beimproved in some cases. Further, with the laser beam having linearpolarization components which are randomly oriented, the beam profile ofthe pre-pulse laser beam L1 can be made to be a profile havingsubstantially flat beam profile (top-hat form 144), as shown in FIG. 59.

Disposing the random phase plate 140 on the beam path along which onlythe pre-pulse laser beam L1 passes makes it possible to irradiate adroplet with a laser beam having substantially flat beam profile. Withthis, positional stability of the pre-plasma PP1 and/or the fragmentsDD1 generated from the droplet D may be improved in some cases. Further,disposing another random phase plate on the beam path along which onlythe main pulse laser beam L2 passes makes it possible to irradiate thepre-plasma PP1 and/or the fragments DD1 having substantially flat beamprofile, whereby the EUV light L3 having substantially flat beam profilemay be generated in some cases. Other configurations and effects aresimilar to those of the above-described first through thirteenthembodiments; thus, the duplicate description thereof is omitted here.

The above-described embodiments and the modifications thereof are merelyexamples for implementing this disclosure, and this disclosure is notlimited thereto. Making various modifications in accordance withspecifications is within the scope of this disclosure. Further, it isapparent from the above description that various other embodiments thatfall within the scope of this disclosure can be made. For example, it isneedless to state that the modifications indicated for each embodimentcan be applied to other embodiments as well.

The invention claimed is:
 1. An extreme ultraviolet light generationsystem used with a laser apparatus, the extreme ultraviolet lightgeneration system comprising: a chamber including at least one windowfor first and second laser beams and a target supply unit for supplyinga droplet of a target material into the chamber; a collector mirrorprovided in the chamber and configured for selectively reflecting atleast ultraviolet light emitted from a plasma generated by irradiatingthe droplet with the first and second laser beams; a first polarizationcontrol unit, provided on a light path of the first laser beam, forconverting the first laser beam into one of a radially polarized laserbeam, an azimuthally polarized laser beam and an elliptically polarizedlaser beam; and a second polarization control unit on a light path ofthe second laser beam, for converting the second laser beam into one ofa radially polarized laser beam, an azimuthally polarized laser beam andan elliptically polarized laser beam, wherein: the first laser beamstrikes the droplet not having been irradiated with a laser beam, andthe second laser beam strikes the target material have been irradiatedwith the first laser beam.
 2. The extreme ultraviolet light generationsystem according to claim 1, further comprising: a magnetic fieldgeneration unit, provided to the chamber, for generating a magneticfield in which a charged particle emitted from the target material thathas been struck by the second laser beam is trapped; and a collectionunit into which the trapped charged particle is collected.
 3. A laserapparatus for outputting a laser beam used to generate extremeultraviolet light, the laser apparatus comprising: a laser source thatoutputs a first laser beam and a second laser beam: a first polarizationcontrol unit, provided on a light path of the first laser beam, forconverting the first laser beam into one of a radially polarized laserbeam, an azimuthally polarized laser beam and an elliptically polarizedlaser beam; a second polarization control unit on a light path of thesecond laser beam, for converting the second laser beam into one of aradially polarized laser beam, an azimuthally polarized laser beam andan elliptically polarized laser beam; and a target supply unit thatsupplies a droplet of a target, wherein: the first laser beam strikesthe droplet not having been irradiated with a laser beam, and the secondlaser beam strikes the target material have been irradiated with thefirst laser beam.
 4. A method for generating extreme ultraviolet lightby irradiating a target material with at least one laser beam, themethod comprising: outputting a first laser beam and a second laserbeam; converting a polarization state of the first laser beam into oneof a radially polarized laser beam, an azimuthally polarized laser beamand an elliptically polarized laser beam; converting a polarizationstate of the second laser beam into one of a radially polarized laserbeam, an azimuthally polarized laser beam and an elliptically polarizedlaser beam; irradiating the droplet, which has not been irradiated witha laser beam, with the first laser beam; and irradiating the targetmaterial, which has been irradiated with the first laser beam, with thesecond laser beam.